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Semiconductor equipment Maintenance team

 Stand by 24/7



Located in Taiwan, trusted professional global service
Contact Us:

Mail: fei.long@zh-fei.com 

Tel: +886-3-5208210 

Cell: +886-975605592 


Regular Maintenance

  • ASML DUV units
  • TEL products
  • Bruker X-RAY metrology tools.

Urgent Service

  • Phone support 
  • On site service

Dismantle/Relocation

  • Dismantle/Relocate (ASML DUV units; TEL; Applied; Bruker,....
  •  Installation/Calibration

Spare parts transaction

  • ASML DUV spare parts
  • Jordan Valley X-RAY spare parts
  • Applied Materials Thin film ENDURA spare parts
  • TEL products spare parts
  • Others SEMI tools spare parts

AOI inspection equipment sales agent

  • Wafer defect inspection
  • Mask defect inspection

X-RAY equipment sales agent

  • XRR metrology unit 
  • XRF  metrology unit
  • XRD metrology unit
  • XDI metrology unit
  • XRAY CT inspection unit
  • Soft X-RAY

Equipment engineer with lot of years experience 

ZhongFei Technology

Satisfied Customer Base

  • tsmc
  • UMC
  • Micron
  • PTI
  • Nanya
  • SMIC
  • SAMSUNG 
  • GLOBAL FOUNDRIES  
  • Intel